Plasma ion source for in situ ion bombardment in a soft x-ray magnetic scattering diffractometer.

نویسندگان

  • Daniel Lengemann
  • Dieter Engel
  • Arno Ehresmann
چکیده

A new plasma ion source for in situ keV He ion bombardment of solid state samples or thin films was designed and built for ion fluences between 1 × 10(12) and 1 × 10(17) ions/cm(2). The system was designed to be mounted to different diffraction chambers for soft x-ray resonant magnetic scattering. Without breaking the vacuum due to He-ion bombardment, structural and magnetic modifications of the samples can be studied in situ and element specifically.

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عنوان ژورنال:
  • The Review of scientific instruments

دوره 83 5  شماره 

صفحات  -

تاریخ انتشار 2012